Nanostructures Guide d'onde Silicon nitride Electron paramagnetic resonance XRD Reactive magnetron sputtering CoMoS Refractive index Multilayers Terres rares Computational electromagnetic methods Photoluminescence Hillocks Si-rich silicon oxide Laser pyrolysis MoS2 Structural properties Semiconductors IR spectroscopy Thin films Silicium Microstructure Rare earth Grazing incidence X-ray diffraction Fluorescence Si nanocluster FTIR Rare-earth Conductivity Electroluminescence Optical properties Energy transfer Silicon Luminescence Feature erasure Neodymium Oxide materials Nanostructuring M-lines Optical amplifiers Infrared absorption Quantum-well Couches minces semi-conductrices Crystal structure Oxides SiC Nanostructured materials Cerium Films Waveguides Silicon nanoclusters Oxide interface Rare-earth ions Al2O3 Pulvérisation cathodique Rare earths Microstructure physique Nanoparticles Cathodoluminescence Photovoltaic Erbium Phase transition Terbium ADE-FDTD Couches minces High-k dielectrics Thin film Radiofrequency magnetron sputtering Friction Doping Silicon nanocrystals CO adsorption Liposomes Lifetime Hybrid materials Magnetron sputtering HR STEM-HAADF AFM PZT Silicon photonics Raman scattering Nanostructure Waveguide Epitaxy Matériaux hybrides Pulvérisation magnétron radiofréquence Atom probe tomography Nanoparticules RF magnetron sputtering Raman Copper Microstructure physics Oxygen vacancies GENOMIQUE Down-conversion Irradiation Sputtering Citric acid Hafnium silicates Hafnium silicate